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NIST-MAS Workshop on Variable Pressure and Environmental Scanning Electron Microscopy (VPSEM-ESEM) for Imaging and Microanalysis: Roadmap 3

Lecture Room A and Poster Hall
National Institute of Standards and Technology
Gaithersburg MD 20899
November 2-4, 2005

http://www.nist.gov/esem

Workshop Record Archive

Co-organizers:
NIST Surface and Microanalysis Science Division (837)
NIST Precision Engineering Division (821)
Microbeam Analysis Society (MAS) <http://www.microbeamanalysis.org/>
Australian Microbeam Analysis Society (AMAS) <http://www.microscopy.org.au/>

NIST has a long history of hosting workshops on topics of interest to the microbeam characterization community:
1967 and 1991: Quantitative Electron Probe Microanalysis;
1974: Secondary Ion Mass Spectrometry;
1975: Use of Monte Carlo Calculations in EPMA and SEM;
1978: Characterization of Particles;
1979: Energy Dispersive X-ray Spectrometry.
Beginning in 2002, NIST has co-hosted with the Microbeam Analysis Society a series of annual workshops continuing this earlier tradition:
2002 Pushing Through the Accuracy Barrier of Quantitative Electron Beam X-ray Microanalysis
2003 Multivariate Data Analysis for Microscopy and Microanalysis
2004 Modeling Electron Transport for Applications in Electron and X-ray Analysis and Metrology

From November 2 to 4, 2005, NIST will co-host a workshop on Variable Pressure Scanning Electron Microscopy (VPSEM) and Environmental SEM (ESEM) in conjunction with the Microbeam Analysis Society (MAS) and the Australian Microbeam Analysis Society (AMAS). Building on the highly successful AMAS Roadmap 1 and 2 workshops on VPSEM-ESEM organized by Brendan Griffin, this VPSEM-ESEM workshop, which constitutes Roadmap 3, will provide an opportunity for technical presentations (platform and poster), demonstrations, and discussions on leading topics in microscopy and microanalysis in VPSEM-ESEM. Special attention will be given to new breakthrough areas, such as combined VPSEM-ESEM-FIB (focused ion beam) instrumentation. Discussions will attempt to identify those critical issues where research is needed for further progress in VPSEM-ESEM.
The program as it has been currently developed is attached below. We are seeking interested participants, proposed titles for presentations, as well as suggestions for additional topics and invited keynote speakers to include. In keeping with past NIST-MAS workshops, there will be no cost for attendance, but pre-registration is required so that the available lecture room space is not overwhelmed and NIST security requirements can be satisfied.

NIST-MAS-AMAS VPSEM-ESEM Workshop
Tentative Program (as of Sept. 21, 2005)

Wednesday, Nov 2, 2005
AM: Electron and ion interactions in the gas environment (including detectors)
Organizer/Invited speaker: Brad Thiel (SUNY-Albany)
Topics: fundamentals, charge control, radiation damage, electron detectors
Additional speakers:
Matthew Phillips
Milos Toth
Ralph Knowles.

Special feature: World Heavy-Weight Throw-Down Steel Cage Match on pressure correction algorithms. (French-Canada vs the World; three falls or submissions determine the winner!)


PM: Contrast mechanisms in VPSEM-ESEM
Organizer/invited speakers: David Joy (Univ. Tennessee) and Brendan Griffin (U. Western Australia)
CONTRAST EFFECTS IN ENVIRONMENTAL MICROSCOPY

Brief Introduction - what do we mean by contrast? David Joy
Contrast in Charge Collection Microscopy, how, why, what? Brendan Griffin
CCI Contrast from soft tissue sample Peda Clode (UWA)
Microscopy and Microanalysis in liquids Jim FitzGerald (UVa) w/ David Joy
Atomic level imaging in liquids Niels de Jonge (ORNL)

Thursday, Nov. 3, 2005
AM: VPSEM-ESEM breakthrough areas:
1. VP Metrology
Session Chairs: Michael T. Postek and Andras E. Vladar
Special Considerations for CD-Metrology in Low Vacuum - .Brad Thiel
The effects of operating parameters on Environmental SEM Metrology - David Joy
Optimizing signal to noise ratio in gas cascade amplification - Vasiliki Tileli (student presentation)
ESEM-based Reference Metrology System - Andras E. Vladar and Michael T. Postek, NIST
ESEM charge control and contamination reduction for high resolution critical dimension microscopy - Milos Toth,
Discussion
2. VPSEM-ESEM FIB
Organizer/Invited Speaker: Lucille Giannuzzi
Additional speakers
John Mansfield

PM: X-ray microanalysis in the VPSEM-ESEM
Organizer: Dale Newbury (NIST)

Invited speaker: Eric Doehne (Getty Conservation Laboratory)
Invited speaker: Dr. Ning Gao (X-ray Optical Systems)
Invited speaker: Robert A. Carlton (GlaxoSmithKline)
Additional speakers:
Dale Newbury and Nicholas Ritchie

PM: Friday, Nov. 4, 2005
AM: Dynamic experiments in VPSEM-ESEM
Organizer/invited speaker: Scott Wight (NIST)

Invited speaker: Dr Ken Severin (University of Alaska Fairbanks)
Invited speaker: Dr Charlotte C. Appel (Haldor Topsøe A/S, Denmark)

PM: Roadmap 3: Critical issues in VPSEM-ESEM: Where do we go next?
Organizer: Brendan Griffin (U. Western Australia)

Format:
1. Make a contentious statement about some aspect of VPSEM-ESEM
2. Support your position for 4 minutes (maximum!)
3. Rebuttal speaker for 4 minutes (maximum!) (prearranged, if possible!)
4. Open discussion for 15 minutes (maximum!)
5. Next topic



A hotel room block has been reserved at the Gaithersburg Hilton, their phone # is 301-977-8900. The block is under the "Microscopy Workshop" and the rate is $109/night. The block will be held until two weeks prior to the meeting. As of 10/24/05 the room block is full. We recommend that you contact the Courtyard below and ask for the NIST visitors rate.

NIST will provide a bus from the Hilton to NIST at 08:00 and from NIST back to the Hilton at 17:45.


Please fill out the online free Registration form. Registration deadline October 21, 2005!


Posters

All attendees are encouraged to present a poster discussing an interesting facet of their work.    These posters will be on display for the full duration of the workshop.   In addition, there will be a poster session on Tuesday.    The poster session is designed to present a realistic snapshot of what participants in this field are doing and their concerns & challenges.    Please plan to present a poster.   Submit a title, author list and a short abstract as a single MS Word or OpenOffice.org Writer document by e-mail to Dale Newbury at dale.newbury@nist.gov on or before October 31, 2005.  These abstracts will be made available to all attendees.

Meals

Because registration for the workshop is free, attendees are responsible for their own meals throughout the week. Coffee &, tea will be served before sessions and during some breaks.  NIST operates a full-service cafeteria down the hall from the meeting location, as well as a snack bar and newsstand.  There are numerous off-site restaurants near NIST available to workshop attendees as well.

NIST Cafeteria Schedule:

Breakfast:                              7:30 a.m. to 9:30 a.m.

Beverages/Snacks:              9:30 a.m. to 11 a.m.

Lunch:                                    11 a.m. to 1:30 p.m. 

Beverages/Snacks:              1:30 p.m. to 2:45 p.m.

Location and Driving Directions

The workshop will be held in the Lecture Room A in the Administration Building on the campus of the National Institute of Standards and Technology (NIST) in Gaithersburg, MD. All meeting attendees are responsible for providing their travel to and from NIST, and for obtaining lodging in Gaithersburg for the duration of the meeting. To make this as convenient as possible, we provide here maps, directions, schedules, and pointers to a variety of information that might be useful to travelers attending the workshop.

 

NIST is located just off Interstate Route 270, about 25 miles (40 kilometers) from the center of Washington, D.C.  If you wish to use an Internet map service to locate the NIST campus, you might need the street address of NIST:

 

100 Bureau Drive

Gaithersburg, MD 20899

 Local Driving Directions to NIST:

From northbound I-270 take Exit 10, Route 117 West, Clopper Road. At the first light on Clopper Road, turn left onto the NIST grounds.

 

From southbound I-270 take Exit 11, MD Route 124, Montgomery Village Avenue/Quince Orchard Road. Bear right at the traffic light at the end of the off-ramp onto MD Route 124 West, Quince Orchard Road. At the second light on Quince Orchard Road, turn left onto MD Route 117, West Diamond Avenue. Turn right at the first light onto NIST grounds.

Driving Directions from Washington Dulles Int’l Airport (IAD):

When leaving the airport, follow the Dulles Access Road to the Bethesda/Baltimore entrance ramp to I-495 . Take I-495 (left lane exit) to I-270 North (towards Maryland).   Take I-270 North (local lanes) toward Montrose Road. Take Exit #10 off I-270 toward Clopper Road (MD 117) and Quince Orchard Rd (MD 124). Note that these exits are right exits, and exit from the collector/distributor lanes off the Interstate. Be aware of the signs directing you to enter the collector/distributor lanes several hundred yards prior to the exit itself.  Merge onto Clopper Road at the end of the off-ramp and pass under I-270.  At first stop light, (Bureau Dr.) turn left into the main NIST entrance.

Driving Directions from Baltimore-Washington Int’l Airport (BWI):

When leaving the airport, take I-195 West. On I-195W take the I-95 South Exit #4B toward Washington DC. Take the I-495 West Exit #27-25 toward College Park/Silver Spring, MD. Take the I-270 North Exit #35 toward Frederick, MD.   Take I-270 North (local lanes) toward Montrose Road. Take Exit #10 off I-270 toward Clopper Road (MD 117) and Quince Orchard Rd (MD 124). Note that these exits are right exits, and exit from the collector/distributor lanes off the Interstate. Be aware of the signs directing you to enter the collector/distributor lanes several hundred yards prior to the exit itself.  Merge onto Clopper Road at the end of the off-ramp and pass under I-270.  At first stop light, (Bureau Dr.) turn left into the main NIST entrance.

Driving Directions from Ronald Reagan National Airport (DCA):

Exit National Airport by heading north on the George Washington (GW) Parkway toward Maryland. Take the GW Parkway to I-495 North toward Maryland. At the lane divide, keep left and exit I-495 to take I-270 North toward Rockville, Gaithersburg, and Frederick. Take I-270 North (local lanes) toward Montrose Road. Take Exit #10 off I-270 toward Clopper Road (MD 117) and Quince Orchard Rd (MD 124). Note that these exits are right exits, and exit from the collector/distributor lanes off the Interstate. Be aware of the signs directing you to enter the collector/distributor lanes several hundred yards prior to the exit itself.  Merge onto Clopper Road at the end of the off-ramp and pass under I-270.  At first stop light, (Bureau Dr.) turn left into the main NIST entrance.

Text Box:  Metro Access to NIST (Subway)

NIST is accessible via the Washington Metro system. NIST is closest to the last stop on the Red Line (Shady Grove station), but it is a ten-minute drive from the Shady Grove station to the NIST campus.  NIST provides shuttle service for official visitors and staff to and from the Shady Grove Metro Station. Visitors using Metro can meet the NIST shuttle at the east side "Kiss & Ride" area of the Shady Grove Metro Station at 15 and 45 minutes past the hour from 8:00 am to 5:30 pm. The shuttle departs from the front of the NIST Administration Building on the hour and half hour, and stops at NIST North four minutes later on the way to the Metro station.

Lodging

We have reserved a block rooms for the workshop at the Gaithersburg Hilton on Perry Parkway, not far from NIST.  The Hilton can be reached at:

 

Gaithersburg Hilton

620 Perry Parkway, Gaithersburg, Md.. 20877

(301) 977-8900 Fax: (301) 869-8597

 

The rooms in the workshop block are $109/night + 12% tax.  (The 2005 GSA Per Diem maximum for Gaithersburg is $153/night for lodging and $51/day for meals and incidental expenses.)

 

The are several other hotels and motels near NIST, including:

 

Courtyard Gaithersburg Lakeforest

805 Russell Avenue

Gaithersburg, MD 20879

Phone: 1 301-670-0008

Fax: 1 301-948-4538

Toll Free: 1 800-336-6880

 

Holiday Inn

2 Montgomery Village Ave., Gaithersburg, Md.. 20879

(301) 948-8900  Fax: (301) 258-1940

 

Motel 6

I-270 South exit #11, North exit #10

497 Quince Orchard Road, Gaithersburg, Md. 20878

(301) 977-3311 Fax: (301) 990-1053

 

A much larger list (about 25 hotels) is available on the NIST website.

 

It is possible to walk from either the Gaithersburg Hilton or Motel 6 through the NIST front gates and to the Administration building in about 20 minutes.  For other local hotels, a car or taxi is a probably necessary.

Further Travel Information

For further information on transportation, food/dining, hotels/motels and more follow one of these links:

 

NIST Visitor Information page

Washington Metro System (stations, system map, fare information, etc)

Workshop Organizers

Please contact one of the workshop organizers if you have questions or suggestions. We hope to see you in Gaithersburg!

 

Dale Newbury                                         Scott Wight

NIST                                                                       NIST

(301) 975-3921                                                       (301) 975-3949

dale.newbury@nist.gov                                  scott.wight@nist.gov

Contact: Dale Newbury (dale.newbury@nist.gov)

 


Last Updated April 25, 2006

Web Contact micro@nist.gov