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Nanoscale and Optical Metrology Group
Mission
Develops,
models, and applies laser and scanned-probe methods to advance measurement
sciences in emerging areas of nanoscale molecular technologies, spectroscopic
monitoring, and characterization of industrial processes and products.
Develops experimental methods, theoretical and numerical models, and
reference standards pertaining to the use of scattering and absorption
spectroscopies in electronic device and sensor fabrication, chemical
manufacturing processes, and analytic services; develops spectroscopic
methods and disseminates reference data for measuring trace gas concentration
in manufacturing processes and in telluric environments; performs
experimental and numerical studies to elucidate the mechanisms of
thermal reactive processes and aerosol growth and formation, and performs
experiments to link electronic and structural properties of molecular
aggregates and films to device and sensor performance.
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